fbpx
Wikipedia

Gallium nitride

Gallium nitride (GaN) is a binary III/V direct bandgap semiconductor commonly used in blue light-emitting diodes since the 1990s. The compound is a very hard material that has a Wurtzite crystal structure. Its wide band gap of 3.4 eV affords it special properties for applications in optoelectronic,[8][9] high-power and high-frequency devices. For example, GaN is the substrate which makes violet (405 nm) laser diodes possible, without requiring nonlinear optical frequency-doubling.

Gallium nitride
Names
IUPAC name
Gallium nitride
Other names
gallium(III) nitride
Identifiers
  • 25617-97-4 Y
3D model (JSmol)
  • Interactive image
  • Interactive image
ChemSpider
  • 105057 Y
ECHA InfoCard 100.042.830
  • LW9640000 = LW9640000
UNII
  • 1R9CC3P9VL Y
  • DTXSID2067111
  • InChI=1S/Ga.N Y
    Key: JMASRVWKEDWRBT-UHFFFAOYSA-N Y
  • InChI=1/Ga.N/rGaN/c1-2
    Key: JMASRVWKEDWRBT-MDMVGGKAAI
  • [Ga]#N
  • [Ga+3].[N-3]
Properties
GaN
Molar mass 83.730 g/mol[1]
Appearance yellow powder
Density 6.1 g/cm3[1]
Melting point >1600 °C[1][2]
Insoluble[3]
Band gap 3.4 eV (300 K, direct)
Electron mobility 1500 cm2/(V·s) (300 K)[4]
Thermal conductivity 1.3 W/(cm·K) (300 K)[5]
2.429
Structure
Wurtzite
C6v4-P63mc
a = 3.186 Å, c = 5.186 Å[6]
Tetrahedral
Thermochemistry
−110.2 kJ/mol[7]
Hazards
Flash point Non-flammable
Related compounds
Other anions
Gallium phosphide
Gallium arsenide
Gallium antimonide
Other cations
Boron nitride
Aluminium nitride
Indium nitride
Related compounds
Aluminium gallium arsenide
Indium gallium arsenide
Gallium arsenide phosphide
Aluminium gallium nitride
Indium gallium nitride
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Y verify (what is YN ?)

Its sensitivity to ionizing radiation is low (like other group III nitrides), making it a suitable material for solar cell arrays for satellites. Military and space applications could also benefit as devices have shown stability in high radiation environments.[10]

Because GaN transistors can operate at much higher temperatures and work at much higher voltages than gallium arsenide (GaAs) transistors, they make ideal power amplifiers at microwave frequencies. In addition, GaN offers promising characteristics for THz devices.[11] Due to high power density and voltage breakdown limits GaN is also emerging as a promising candidate for 5G cellular base station applications.

Physical properties

 
GaN crystal

GaN is a very hard (Knoop hardness 14.21 GPa[12]: 4 ), mechanically stable wide-bandgap semiconductor material with high heat capacity and thermal conductivity.[13] In its pure form it resists cracking and can be deposited in thin film on sapphire or silicon carbide, despite the mismatch in their lattice constants.[13] GaN can be doped with silicon (Si) or with oxygen[14] to n-type and with magnesium (Mg) to p-type.[15][16] However, the Si and Mg atoms change the way the GaN crystals grow, introducing tensile stresses and making them brittle.[17] Gallium nitride compounds also tend to have a high dislocation density, on the order of 108 to 1010 defects per square centimeter.[18]

The U.S. Army Research Laboratory (ARL) provided the first measurement of the high field electron velocity in GaN in 1999.[19] Scientists at ARL experimentally obtained a peak steady-state velocity of 1.9 x 107 cm/s, with a transit time of 2.5 picoseconds, attained at an electric field of 225 kV/cm. With this information, the electron mobility was calculated, thus providing data for the design of GaN devices.

Developments

One of the earliest synthesis of gallium nitride was at the George Herbert Jones Laboratory in 1932.[20]

An early synthesis of gallium nitride was by Robert Juza and Harry Hahn in 1938.[21]

GaN with a high crystalline quality can be obtained by depositing a buffer layer at low temperatures.[22] Such high-quality GaN led to the discovery of p-type GaN,[15] p-n junction blue/UV-LEDs[15] and room-temperature stimulated emission[23] (essential for laser action).[24] This has led to the commercialization of high-performance blue LEDs and long-lifetime violet laser diodes, and to the development of nitride-based devices such as UV detectors and high-speed field-effect transistors.

LEDs

High-brightness GaN light-emitting diodes (LEDs) completed the range of primary colors, and made possible applications such as daylight visible full-color LED displays, white LEDs and blue laser devices. The first GaN-based high-brightness LEDs used a thin film of GaN deposited via metalorganic vapour-phase epitaxy (MOVPE) on sapphire. Other substrates used are zinc oxide, with lattice constant mismatch of only 2% and silicon carbide (SiC).[25] Group III nitride semiconductors are, in general, recognized as one of the most promising semiconductor families for fabricating optical devices in the visible short-wavelength and UV region.

GaN transistors and power ICs

The very high breakdown voltages,[26] high electron mobility and saturation velocity of GaN has also made it an ideal candidate for high-power and high-temperature microwave applications, as evidenced by its high Johnson's figure of merit. Potential markets for high-power/high-frequency devices based on GaN include microwave radio-frequency power amplifiers (such as those used in high-speed wireless data transmission) and high-voltage switching devices for power grids. A potential mass-market application for GaN-based RF transistors is as the microwave source for microwave ovens, replacing the magnetrons currently used. The large band gap means that the performance of GaN transistors is maintained up to higher temperatures (~400 °C[27]) than silicon transistors (~150 °C[27]) because it lessens the effects of thermal generation of charge carriers that are inherent to any semiconductor. The first gallium nitride metal semiconductor field-effect transistors (GaN MESFET) were experimentally demonstrated in 1993[28] and they are being actively developed.

In 2010, the first enhancement-mode GaN transistors became generally available.[29] Only n-channel transistors were available.[29] These devices were designed to replace power MOSFETs in applications where switching speed or power conversion efficiency is critical. These transistors are built by growing a thin layer of GaN on top of a standard silicon wafer, often referred to as GaN-on-Si by manufacturers.[30] This allows the FETs to maintain costs similar to silicon power MOSFETs but with the superior electrical performance of GaN. Another seemingly viable solution for realizing enhancement-mode GaN-channel HFETs is to employ a lattice-matched quaternary AlInGaN layer of acceptably low spontaneous polarization mismatch to GaN.[31]

GaN power ICs monolithically integrate a GaN FET, GaN-based drive circuitry and circuit protection into a single surface-mount device.[32] [33] Integration means that the gate-drive loop has essentially zero impedance, which further improves efficiency by virtually eliminating FET turn-off losses. Academic studies into creating low-voltage GaN power ICs began at the Hong Kong University of Science and Technology (HKUST) and the first devices were demonstrated in 2015. Commercial GaN power IC production began in 2018.

CMOS logic

In 2016 the first GaN CMOS logic using PMOS and NMOS transistors was reported with gate lengths of 0.5μm (gate widths of the PMOS and NMOS transistors were 500 μm and 50 μm, respectively).[34]

Applications

LEDs and lasers

GaN-based violet laser diodes are used to read Blu-ray Discs. The mixture of GaN with In (InGaN) or Al (AlGaN) with a band gap dependent on the ratio of In or Al to GaN allows the manufacture of light-emitting diodes (LEDs) with colors that can go from red to ultra-violet.[25]

Transistors and power ICs

GaN transistors are suitable for high frequency, high voltage, high temperature and high efficiency applications.[citation needed] GaN is efficient at transferring current, and this ultimately means that less energy is lost to heat. [35]

GaN HEMTs have been offered commercially since 2006, and have found immediate use in various wireless infrastructure applications due to their high efficiency and high voltage operation. A second generation of devices with shorter gate lengths will address higher frequency telecom and aerospace applications.[36]

GaN-based MOSFET and MESFET transistors also offer advantages including lower loss in high power electronics, especially in automotive and electric car applications.[37] Since 2008 these can be formed on a silicon substrate.[37] High-voltage (800 V) Schottky barrier diodes (SBDs) have also been made.[37]

The higher efficiency and high power density of integrated GaN power ICs allows them to reduce the size, weight and component count of applications including mobile and laptop chargers, consumer electronics, computing equipment and electric vehicles.

GaN-based electronics (not pure GaN) have the potential to drastically cut energy consumption, not only in consumer applications but even for power transmission utilities.

Unlike silicon transistors which switch off due to power surges, GaN transistors are typically depletion mode devices (i.e. on / resistive when the gate-source voltage is zero). Several methods have been proposed to reach normally-off (or E-mode) operation, which is necessary for use in power electronics:[38][39]

  • the implantation of fluorine ions under the gate (the negative charge of the F-ions favors the depletion of the channel)
  • the use of a MIS-type gate stack, with recess of the AlGaN
  • the integration of a cascaded pair constituted by a normally-on GaN transistor and a low voltage silicon MOSFET
  • the use of a p-type layer on top of the AlGaN/GaN heterojunction

Radars

They are also utilized in military electronics such as active electronically scanned array radars.[40]

Thales Group introduced the Ground Master 400 radar in 2010 utilizing GaN technology. In 2021 Thales put in operation more than 50,000 GaN Transmitters on radar systems.[41]

The U.S. Army funded Lockheed Martin to incorporate GaN active-device technology into the AN/TPQ-53 radar system to replace two medium-range radar systems, the AN/TPQ-36 and the AN/TPQ-37.[42][43] The AN/TPQ-53 radar system was designed to detect, classify, track, and locate enemy indirect fire systems, as well as unmanned aerial systems.[44] The AN/TPQ-53 radar system provided enhanced performance, greater mobility, increased reliability and supportability, lower life-cycle cost, and reduced crew size compared to the AN/TPQ-36 and the AN/TPQ-37 systems.[42]

Lockheed Martin fielded other tactical operational radars with GaN technology in 2018, including TPS-77 Multi Role Radar System deployed to Latvia and Romania.[45] In 2019, Lockheed Martin's partner ELTA Systems Limited, developed a GaN-based ELM-2084 Multi Mission Radar that was able to detect and track air craft and ballistic targets, while providing fire control guidance for missile interception or air defense artillery.

On April 8, 2020, Saab flight tested its new GaN designed AESA X-band radar in a JAS-39 Gripen fighter.[46] Saab already offers products with GaN based radars, like the Giraffe radar, Erieye, GlobalEye, and Arexis EW.[47][48][49][50] Saab also delivers major subsystems, assemblies and software for the AN/TPS-80 (G/ATOR)[51]

Nanoscale

GaN nanotubes and nanowires are proposed for applications in nanoscale electronics, optoelectronics and biochemical-sensing applications.[52][53]

Spintronics potential

When doped with a suitable transition metal such as manganese, GaN is a promising spintronics material (magnetic semiconductors).[25]

Synthesis

Bulk substrates

GaN crystals can be grown from a molten Na/Ga melt held under 100 atmospheres of pressure of N2 at 750 °C. As Ga will not react with N2 below 1000 °C, the powder must be made from something more reactive, usually in one of the following ways:

2 Ga + 2 NH3 → 2 GaN + 3 H2[54]
Ga2O3 + 2 NH3 → 2 GaN + 3 H2O[55]

Gallium nitride can also be synthesized by injecting ammonia gas into molten gallium at 900-980 °C at normal atmospheric pressure.[56]

Metal-organic vapour phase epitaxy

Blue, white and ultraviolet LEDs are grown on industrial scale by MOVPE.[57][58] The precursors are ammonia with either trimethylgallium or triethylgallium, the carrier gas being nitrogen or hydrogen. Growth temperature ranges between 800 and 1100 °C. Introduction of trimethylaluminium and/or trimethylindium is necessary for growing quantum wells and other kinds of heterostructures.

Molecular beam epitaxy

Commercially, GaN crystals can be grown using molecular beam epitaxy or metalorganic vapour phase epitaxy. This process can be further modified to reduce dislocation densities. First, an ion beam is applied to the growth surface in order to create nanoscale roughness. Then, the surface is polished. This process takes place in a vacuum. Polishing methods typically employ a liquid electrolyte and UV irradiation to enable mechanical removal of a thin oxide layer from the wafer. More recent methods have been developed which utilize solid-state polymer electrolytes which are solvent-free and require no radiation before polishing.[59]

Safety

GaN dust is an irritant to skin, eyes and lungs. The environment, health and safety aspects of gallium nitride sources (such as trimethylgallium and ammonia) and industrial hygiene monitoring studies of MOVPE sources have been reported in a 2004 review.[60]

Bulk GaN is non-toxic and biocompatible.[61] Therefore, it may be used in the electrodes and electronics of implants in living organisms.

See also

References

  1. ^ a b c Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). Boca Raton, FL: CRC Press. p. 4.64. ISBN 1-4398-5511-0.
  2. ^ Harafuji, Kenji; Tsuchiya, Taku; Kawamura, Katsuyuki (2004). "Molecular dynamics simulation for evaluating melting point of wurtzite-type GaN crystal". Journal of Applied Physics. 96 (5): 2501. Bibcode:2004JAP....96.2501H. doi:10.1063/1.1772878.
  3. ^ Foster, Corey M.; Collazo, Ramon; Sitar, Zlatko; Ivanisevic, Albena (2013). "abstract NCSU study: Aqueous Stability of Ga- and N-Polar Gallium Nitride". Langmuir. 29 (1): 216–220. doi:10.1021/la304039n. PMID 23227805.
  4. ^ Johan Strydom; Michael de Rooij; David Reusch; Alex Lidow (2019). GaN Transistors for efficient power conversion (3 ed.). California, USA: Wiley. p. 3. ISBN 978-1-119-59442-0.
  5. ^ Mion, Christian (2005). "Investigation of the Thermal Properties of Gallium Nitride Using the Three Omega Technique", Thesis, North Carolina State University.
  6. ^ Bougrov V., Levinshtein M.E., Rumyantsev S.L., Zubrilov A., in Properties of Advanced Semiconductor Materials GaN, AlN, InN, BN, SiC, SiGe. Eds. Levinshtein M.E., Rumyantsev S.L., Shur M.S., John Wiley & Sons, Inc., New York, 2001, 1–30
  7. ^ Haynes, William M., ed. (2011). CRC Handbook of Chemistry and Physics (92nd ed.). Boca Raton, FL: CRC Press. p. 5.12. ISBN 1-4398-5511-0.
  8. ^ Di Carlo, A. (2001). "Tuning Optical Properties of GaN-Based Nanostructures by Charge Screening". Physica Status Solidi A. 183 (1): 81–85. Bibcode:2001PSSAR.183...81D. doi:10.1002/1521-396X(200101)183:1<81::AID-PSSA81>3.0.CO;2-N.
  9. ^ Arakawa, Y. (2002). "Progress in GaN-based quantum dots for optoelectronics applications". IEEE Journal of Selected Topics in Quantum Electronics. 8 (4): 823–832. Bibcode:2002IJSTQ...8..823A. doi:10.1109/JSTQE.2002.801675.
  10. ^ Lidow, Alexander; Witcher, J. Brandon; Smalley, Ken (March 2011). "Enhancement Mode Gallium Nitride (eGaN) FET Characteristics under Long Term Stress" (PDF). GOMAC Tech Conference.
  11. ^ Ahi, Kiarash (September 2017). "Review of GaN-based devices for terahertz operation". Optical Engineering. 56 (9): 090901. Bibcode:2017OptEn..56i0901A. doi:10.1117/1.OE.56.9.090901 – via SPIE.
  12. ^ Gallium Nitride as an Electromechanical Material. R-Z. IEEE 2014
  13. ^ a b Akasaki, I.; Amano, H. (1997). "Crystal Growth and Conductivity Control of Group III Nitride Semiconductors and Their Application to Short Wavelength Light Emitters". Japanese Journal of Applied Physics. 36 (9A): 5393. Bibcode:1997JaJAP..36.5393A. doi:10.1143/JJAP.36.5393.
  14. ^ Wetzel, C.; Suski, T.; Ager, J.W. III; Fischer, S.; Meyer, B.K.; Grzegory, I.; Porowski, S. (1996) Strongly localized donor level in oxygen doped gallium nitride, International conference on physics of semiconductors, Berlin (Germany), 21–26 July 1996.
  15. ^ a b c Amano, H.; Kito, M.; Hiramatsu, K.; Akasaki, I. (1989). "P-Type Conduction in Mg-Doped GaN Treated with Low-Energy Electron Beam Irradiation (LEEBI)". Japanese Journal of Applied Physics. 28 (12): L2112. Bibcode:1989JaJAP..28L2112A. doi:10.1143/JJAP.28.L2112.
  16. ^ "Discovery in gallium nitride a key enabler of energy efficient electronics". Cornell Chronicle. Retrieved 20 October 2022.
  17. ^ Terao, S.; Iwaya, M.; Nakamura, R.; Kamiyama, S.; Amano, H.; Akasaki, I. (2001). "Fracture of AlxGa1−xN/GaN Heterostructure – Compositional and Impurity Dependence –". Japanese Journal of Applied Physics. 40 (3A): L195. Bibcode:2001JaJAP..40..195T. doi:10.1143/JJAP.40.L195. S2CID 122191162.
  18. ^ Preuss, Paul (11 August 2000). Blue Diode Research Hastens Day of Large-Scale Solid-State Light Sources. Berkeley Lab., lbl.gov.
  19. ^ Wraback, M.; Shen, H.; Carrano, J.C.; Collins, C.J; Campbell, J.C.; Dupuis, R.D.; Schurman, M.J.; Ferguson, I.T. (2000). "Time-Resolved Electroabsorption Measurement of the electron velocity-field characteristic in GaN". Applied Physics Letters. 76 (9): 1155–1157. Bibcode:2000ApPhL..76.1155W. doi:10.1063/1.125968.
  20. ^ https://www.edn.com/a-brief-history-of-gallium-nitride-gan-semiconductors/
  21. ^ Juza, Robert; Hahn, Harry (1938). "Über die Kristallstrukturen von Cu3N, GaN und InN Metallamide und Metallnitride". Zeitschrift für Anorganische und Allgemeine Chemie. 239 (3): 282–287. doi:10.1002/zaac.19382390307.
  22. ^ Amano, H.; Sawaki, N.; Akasaki, I.; Toyoda, Y. (1986). "Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer". Applied Physics Letters. 48 (5): 353. Bibcode:1986ApPhL..48..353A. doi:10.1063/1.96549. S2CID 59066765.
  23. ^ Amano, H.; Asahi, T.; Akasaki, I. (1990). "Stimulated Emission Near Ultraviolet at Room Temperature from a GaN Film Grown on Sapphire by MOVPE Using an AlN Buffer Layer". Japanese Journal of Applied Physics. 29 (2): L205. Bibcode:1990JaJAP..29L.205A. doi:10.1143/JJAP.29.L205. S2CID 120489784.
  24. ^ Akasaki, I.; Amano, H.; Sota, S.; Sakai, H.; Tanaka, T.; Masayoshikoike (1995). "Stimulated Emission by Current Injection from an AlGaN/GaN/GaInN Quantum Well Device". Japanese Journal of Applied Physics. 34 (11B): L1517. Bibcode:1995JaJAP..34L1517A. doi:10.1143/JJAP.34.L1517.
  25. ^ a b c Morkoç, H.; Strite, S.; Gao, G. B.; Lin, M. E.; Sverdlov, B.; Burns, M. (1994). "Large-band-gap SiC, III-V nitride, and II-VI ZnSe-based semiconductor device technologies". Journal of Applied Physics. 76 (3): 1363. Bibcode:1994JAP....76.1363M. doi:10.1063/1.358463.
  26. ^ Dora, Y.; Chakraborty, A.; McCarthy, L.; Keller, S.; Denbaars, S. P.; Mishra, U. K. (2006). "High Breakdown Voltage Achieved on AlGaN/GaN HEMTs with Integrated Slant Field Plates". IEEE Electron Device Letters. 27 (9): 713. Bibcode:2006IEDL...27..713D. doi:10.1109/LED.2006.881020. S2CID 38268864.
  27. ^ a b Why Gallium Nitride?
  28. ^ Asif Khan, M.; Kuznia, J. N.; Bhattarai, A. R.; Olson, D. T. (1993). "Metal semiconductor field effect transistor based on single crystal GaN". Applied Physics Letters. 62 (15): 1786. Bibcode:1993ApPhL..62.1786A. doi:10.1063/1.109549.
  29. ^ a b Davis, Sam (March 2010). "Enhancement Mode GaN MOSFET Delivers Impressive Performance". Electronic Design. 36 (3).
  30. ^ "GaN-on-silicon enablingGaN power electronics, but to capture less than 5%of LED making by 2020" (PDF). Compounds & AdvancedSilicon. SeminconductorTODAY. 9 (April/May 2014).
  31. ^ Rahbardar Mojaver, Hassan; Gosselin, Jean-Lou; Valizadeh, Pouya (27 June 2017). "Use of a bilayer lattice-matched AlInGaN barrier for improving the channel carrier confinement of enhancement-mode AlInGaN/GaN hetero-structure field-effect transistors". Journal of Applied Physics. 121 (24): 244502. Bibcode:2017JAP...121x4502R. doi:10.1063/1.4989836. ISSN 0021-8979.
  32. ^ "GaN Power ICs". Navitas.
  33. ^ "GaN Integrated Circuits". EPC.
  34. ^ HRL Laboratories claims first gallium nitride CMOS transistor fabrication. Feb 2016
  35. ^ "Apple 30W Compact GaN Charger". Retrieved 30 April 2022.
  36. ^ 2010 IEEE Intl. Symposium, Technical Abstract Book, Session TH3D, pp. 164–165
  37. ^ a b c Davis, Sam (1 November 2009). "SiC and GaN Vie for Slice of the Electric Vehicle Pie". Power Electronics. Retrieved 3 January 2016. These devices offer lower loss during power conversion and operational characteristics that surpass traditional silicon counterparts.
  38. ^ "Making the new silicon: Gallium nitride electronics could drastically cut energy usage". Retrieved 28 June 2018.
  39. ^ Meneghini, Matteo; Hilt, Oliver; Wuerfl, Joachim; Meneghesso, Gaudenzio (25 January 2017). "Technology and Reliability of Normally-Off GaN HEMTs with p-Type Gate". Energies. 10 (2): 153. doi:10.3390/en10020153.
  40. ^ "Gallium Nitride-Based Modules Set New 180-Day Standard For High Power Operation." Northrop Grumman, 13 April 2011.
  41. ^ Pocock, Chris. "Export Market Strong for Thales Ground Radar". Aviation International News. Retrieved 28 May 2021.
  42. ^ a b Brown, Jack (16 October 2018). "GaN Extends Range of Army's Q-53 Radar System". Microwaves&RF. Retrieved 23 July 2019.
  43. ^ Martin, Lockheed. "U.S. Army Awards Lockheed Martin Contract Extending AN/TPQ-53 Radar Range". Lockheed Martin. Retrieved 23 July 2019.
  44. ^ Martin, Lockheed. "AN/TPQ-53 Radar System". Lockheed Martin. Retrieved 23 July 2019.
  45. ^ Martin, Lockheed. "Lockheed Martin Demonstrates Mature, Proven Radar Technology During U.S. Army's Sense-Off". Lockheed Martin. Retrieved 23 July 2019.
  46. ^ . Archived from the original on 2 May 2020.
  47. ^ . Archived from the original on 6 February 2016.
  48. ^ . Archived from the original on 23 August 2020.
  49. ^ . Archived from the original on 5 December 2018.
  50. ^ . Archived from the original on 23 August 2020.
  51. ^ "Saab to Supply Key Components in Support of the U.S. Marine Corps Ground/Air Task Oriented Radar (G/ATOR) Program". 12 February 2015. from the original on 31 October 2020.
  52. ^ Goldberger, J.; He, R.; Zhang, Y.; Lee, S.; Yan, H.; Choi, H. J.; Yang, P. (2003). "Single-crystal gallium nitride nanotubes". Nature. 422 (6932): 599–602. Bibcode:2003Natur.422..599G. doi:10.1038/nature01551. PMID 12686996. S2CID 4391664.
  53. ^ Zhao, Chao; Alfaraj, Nasir; Subedi, Ram Chandra; Liang, Jian Wei; Alatawi, Abdullah A.; Alhamoud, Abdullah A.; Ebaid, Mohamed; Alias, Mohd Sharizal; Ng, Tien Khee; Ooi, Boon S. (2019). "III-nitride nanowires on unconventional substrates: From materials to optoelectronic device applications". Progress in Quantum Electronics. 61: 1–31. doi:10.1016/j.pquantelec.2018.07.001.
  54. ^ Ralf Riedel, I-Wei Chen (2015). Ceramics Science and Technology, Volume 2: Materials and Properties. Wiley-Vch. ISBN 978-3527802579.
  55. ^ Jian-Jang Huang, Hao-Chung Kuo, Shyh-Chiang Shen (2014). Nitride Semiconductor Light-Emitting Diodes (LEDs). p. 68. ISBN 978-0857099303.{{cite book}}: CS1 maint: multiple names: authors list (link)
  56. ^ M. Shibata, T. Furuya, H. Sakaguchi, S. Kuma (1999). "Synthesis of gallium nitride by ammonia injection into gallium melt". Journal of Crystal Growth. 196 (1): 47–52. Bibcode:1999JCrGr.196...47S. doi:10.1016/S0022-0248(98)00819-7.{{cite journal}}: CS1 maint: multiple names: authors list (link)
  57. ^ US8357945B2, D'Evelyn, Mark Philip; Park, Dong-Sil & LeBoeuf, Steven Francis et al., "Gallium nitride crystal and method of making same", issued 2013-01-22 
  58. ^ "Google Patents". patents.google.com. Retrieved 20 October 2022.
  59. ^ Murata, Junji; Nishiguchi, Yoshito; Iwasaki, Takeshi (1 December 2018). "Liquid electrolyte-free electrochemical oxidation of GaN surface using a solid polymer electrolyte toward electrochemical mechanical polishing". Electrochemistry Communications. 97: 110–113. doi:10.1016/j.elecom.2018.11.006. ISSN 1388-2481.
  60. ^ Shenai-Khatkhate, D. V.; Goyette, R. J.; Dicarlo, R. L. Jr; Dripps, G. (2004). "Environment, health and safety issues for sources used in MOVPE growth of compound semiconductors". Journal of Crystal Growth. 272 (1–4): 816–21. Bibcode:2004JCrGr.272..816S. doi:10.1016/j.jcrysgro.2004.09.007.
  61. ^ Shipman, Matt and Ivanisevic, Albena (24 October 2011). . North Carolina State University

External links

  • Ioffe data archive

gallium, nitride, this, article, about, chemical, compound, other, uses, binary, direct, bandgap, semiconductor, commonly, used, blue, light, emitting, diodes, since, 1990s, compound, very, hard, material, that, wurtzite, crystal, structure, wide, band, afford. This article is about Gallium nitride the chemical compound For other uses see Gan Gallium nitride GaN is a binary III V direct bandgap semiconductor commonly used in blue light emitting diodes since the 1990s The compound is a very hard material that has a Wurtzite crystal structure Its wide band gap of 3 4 eV affords it special properties for applications in optoelectronic 8 9 high power and high frequency devices For example GaN is the substrate which makes violet 405 nm laser diodes possible without requiring nonlinear optical frequency doubling Gallium nitride NamesIUPAC name Gallium nitrideOther names gallium III nitrideIdentifiersCAS Number 25617 97 4 Y3D model JSmol Interactive imageInteractive imageChemSpider 105057 YECHA InfoCard 100 042 830PubChem CID LW9640000 LW9640000UNII 1R9CC3P9VL YCompTox Dashboard EPA DTXSID2067111InChI InChI 1S Ga N YKey JMASRVWKEDWRBT UHFFFAOYSA N YInChI 1 Ga N rGaN c1 2Key JMASRVWKEDWRBT MDMVGGKAAISMILES Ga N Ga 3 N 3 PropertiesChemical formula GaNMolar mass 83 730 g mol 1 Appearance yellow powderDensity 6 1 g cm3 1 Melting point gt 1600 C 1 2 Solubility in water Insoluble 3 Band gap 3 4 eV 300 K direct Electron mobility 1500 cm2 V s 300 K 4 Thermal conductivity 1 3 W cm K 300 K 5 Refractive index nD 2 429StructureCrystal structure WurtziteSpace group C6v4 P63mcLattice constant a 3 186 A c 5 186 A 6 Coordination geometry TetrahedralThermochemistryStd enthalpy offormation DfH 298 110 2 kJ mol 7 HazardsFlash point Non flammableRelated compoundsOther anions Gallium phosphideGallium arsenideGallium antimonideOther cations Boron nitrideAluminium nitrideIndium nitrideRelated compounds Aluminium gallium arsenideIndium gallium arsenideGallium arsenide phosphideAluminium gallium nitrideIndium gallium nitrideExcept where otherwise noted data are given for materials in their standard state at 25 C 77 F 100 kPa Y verify what is Y N Infobox references Its sensitivity to ionizing radiation is low like other group III nitrides making it a suitable material for solar cell arrays for satellites Military and space applications could also benefit as devices have shown stability in high radiation environments 10 Because GaN transistors can operate at much higher temperatures and work at much higher voltages than gallium arsenide GaAs transistors they make ideal power amplifiers at microwave frequencies In addition GaN offers promising characteristics for THz devices 11 Due to high power density and voltage breakdown limits GaN is also emerging as a promising candidate for 5G cellular base station applications Contents 1 Physical properties 2 Developments 2 1 LEDs 2 2 GaN transistors and power ICs 2 2 1 CMOS logic 3 Applications 3 1 LEDs and lasers 3 2 Transistors and power ICs 3 3 Radars 3 4 Nanoscale 3 5 Spintronics potential 4 Synthesis 4 1 Bulk substrates 4 2 Metal organic vapour phase epitaxy 4 3 Molecular beam epitaxy 5 Safety 6 See also 7 References 8 External linksPhysical properties Edit GaN crystal GaN is a very hard Knoop hardness 14 21 GPa 12 4 mechanically stable wide bandgap semiconductor material with high heat capacity and thermal conductivity 13 In its pure form it resists cracking and can be deposited in thin film on sapphire or silicon carbide despite the mismatch in their lattice constants 13 GaN can be doped with silicon Si or with oxygen 14 to n type and with magnesium Mg to p type 15 16 However the Si and Mg atoms change the way the GaN crystals grow introducing tensile stresses and making them brittle 17 Gallium nitride compounds also tend to have a high dislocation density on the order of 108 to 1010 defects per square centimeter 18 The U S Army Research Laboratory ARL provided the first measurement of the high field electron velocity in GaN in 1999 19 Scientists at ARL experimentally obtained a peak steady state velocity of 1 9 x 107 cm s with a transit time of 2 5 picoseconds attained at an electric field of 225 kV cm With this information the electron mobility was calculated thus providing data for the design of GaN devices Developments EditOne of the earliest synthesis of gallium nitride was at the George Herbert Jones Laboratory in 1932 20 An early synthesis of gallium nitride was by Robert Juza and Harry Hahn in 1938 21 GaN with a high crystalline quality can be obtained by depositing a buffer layer at low temperatures 22 Such high quality GaN led to the discovery of p type GaN 15 p n junction blue UV LEDs 15 and room temperature stimulated emission 23 essential for laser action 24 This has led to the commercialization of high performance blue LEDs and long lifetime violet laser diodes and to the development of nitride based devices such as UV detectors and high speed field effect transistors LEDs Edit High brightness GaN light emitting diodes LEDs completed the range of primary colors and made possible applications such as daylight visible full color LED displays white LEDs and blue laser devices The first GaN based high brightness LEDs used a thin film of GaN deposited via metalorganic vapour phase epitaxy MOVPE on sapphire Other substrates used are zinc oxide with lattice constant mismatch of only 2 and silicon carbide SiC 25 Group III nitride semiconductors are in general recognized as one of the most promising semiconductor families for fabricating optical devices in the visible short wavelength and UV region GaN transistors and power ICs Edit The very high breakdown voltages 26 high electron mobility and saturation velocity of GaN has also made it an ideal candidate for high power and high temperature microwave applications as evidenced by its high Johnson s figure of merit Potential markets for high power high frequency devices based on GaN include microwave radio frequency power amplifiers such as those used in high speed wireless data transmission and high voltage switching devices for power grids A potential mass market application for GaN based RF transistors is as the microwave source for microwave ovens replacing the magnetrons currently used The large band gap means that the performance of GaN transistors is maintained up to higher temperatures 400 C 27 than silicon transistors 150 C 27 because it lessens the effects of thermal generation of charge carriers that are inherent to any semiconductor The first gallium nitride metal semiconductor field effect transistors GaN MESFET were experimentally demonstrated in 1993 28 and they are being actively developed In 2010 the first enhancement mode GaN transistors became generally available 29 Only n channel transistors were available 29 These devices were designed to replace power MOSFETs in applications where switching speed or power conversion efficiency is critical These transistors are built by growing a thin layer of GaN on top of a standard silicon wafer often referred to as GaN on Si by manufacturers 30 This allows the FETs to maintain costs similar to silicon power MOSFETs but with the superior electrical performance of GaN Another seemingly viable solution for realizing enhancement mode GaN channel HFETs is to employ a lattice matched quaternary AlInGaN layer of acceptably low spontaneous polarization mismatch to GaN 31 GaN power ICs monolithically integrate a GaN FET GaN based drive circuitry and circuit protection into a single surface mount device 32 33 Integration means that the gate drive loop has essentially zero impedance which further improves efficiency by virtually eliminating FET turn off losses Academic studies into creating low voltage GaN power ICs began at the Hong Kong University of Science and Technology HKUST and the first devices were demonstrated in 2015 Commercial GaN power IC production began in 2018 CMOS logic Edit In 2016 the first GaN CMOS logic using PMOS and NMOS transistors was reported with gate lengths of 0 5mm gate widths of the PMOS and NMOS transistors were 500 mm and 50 mm respectively 34 Applications EditLEDs and lasers Edit GaN based violet laser diodes are used to read Blu ray Discs The mixture of GaN with In InGaN or Al AlGaN with a band gap dependent on the ratio of In or Al to GaN allows the manufacture of light emitting diodes LEDs with colors that can go from red to ultra violet 25 Transistors and power ICs Edit GaN high electron mobility transistors manufactured by Ferdinand Braun Institut GaN transistors are suitable for high frequency high voltage high temperature and high efficiency applications citation needed GaN is efficient at transferring current and this ultimately means that less energy is lost to heat 35 GaN HEMTs have been offered commercially since 2006 and have found immediate use in various wireless infrastructure applications due to their high efficiency and high voltage operation A second generation of devices with shorter gate lengths will address higher frequency telecom and aerospace applications 36 GaN based MOSFET and MESFET transistors also offer advantages including lower loss in high power electronics especially in automotive and electric car applications 37 Since 2008 these can be formed on a silicon substrate 37 High voltage 800 V Schottky barrier diodes SBDs have also been made 37 The higher efficiency and high power density of integrated GaN power ICs allows them to reduce the size weight and component count of applications including mobile and laptop chargers consumer electronics computing equipment and electric vehicles GaN based electronics not pure GaN have the potential to drastically cut energy consumption not only in consumer applications but even for power transmission utilities Unlike silicon transistors which switch off due to power surges GaN transistors are typically depletion mode devices i e on resistive when the gate source voltage is zero Several methods have been proposed to reach normally off or E mode operation which is necessary for use in power electronics 38 39 the implantation of fluorine ions under the gate the negative charge of the F ions favors the depletion of the channel the use of a MIS type gate stack with recess of the AlGaN the integration of a cascaded pair constituted by a normally on GaN transistor and a low voltage silicon MOSFET the use of a p type layer on top of the AlGaN GaN heterojunctionRadars Edit They are also utilized in military electronics such as active electronically scanned array radars 40 Thales Group introduced the Ground Master 400 radar in 2010 utilizing GaN technology In 2021 Thales put in operation more than 50 000 GaN Transmitters on radar systems 41 The U S Army funded Lockheed Martin to incorporate GaN active device technology into the AN TPQ 53 radar system to replace two medium range radar systems the AN TPQ 36 and the AN TPQ 37 42 43 The AN TPQ 53 radar system was designed to detect classify track and locate enemy indirect fire systems as well as unmanned aerial systems 44 The AN TPQ 53 radar system provided enhanced performance greater mobility increased reliability and supportability lower life cycle cost and reduced crew size compared to the AN TPQ 36 and the AN TPQ 37 systems 42 Lockheed Martin fielded other tactical operational radars with GaN technology in 2018 including TPS 77 Multi Role Radar System deployed to Latvia and Romania 45 In 2019 Lockheed Martin s partner ELTA Systems Limited developed a GaN based ELM 2084 Multi Mission Radar that was able to detect and track air craft and ballistic targets while providing fire control guidance for missile interception or air defense artillery On April 8 2020 Saab flight tested its new GaN designed AESA X band radar in a JAS 39 Gripen fighter 46 Saab already offers products with GaN based radars like the Giraffe radar Erieye GlobalEye and Arexis EW 47 48 49 50 Saab also delivers major subsystems assemblies and software for the AN TPS 80 G ATOR 51 Nanoscale Edit GaN nanotubes and nanowires are proposed for applications in nanoscale electronics optoelectronics and biochemical sensing applications 52 53 Spintronics potential Edit When doped with a suitable transition metal such as manganese GaN is a promising spintronics material magnetic semiconductors 25 Synthesis EditBulk substrates Edit GaN crystals can be grown from a molten Na Ga melt held under 100 atmospheres of pressure of N2 at 750 C As Ga will not react with N2 below 1000 C the powder must be made from something more reactive usually in one of the following ways 2 Ga 2 NH3 2 GaN 3 H2 54 Ga2O3 2 NH3 2 GaN 3 H2O 55 Gallium nitride can also be synthesized by injecting ammonia gas into molten gallium at 900 980 C at normal atmospheric pressure 56 Metal organic vapour phase epitaxy Edit Blue white and ultraviolet LEDs are grown on industrial scale by MOVPE 57 58 The precursors are ammonia with either trimethylgallium or triethylgallium the carrier gas being nitrogen or hydrogen Growth temperature ranges between 800 and 1100 C Introduction of trimethylaluminium and or trimethylindium is necessary for growing quantum wells and other kinds of heterostructures Molecular beam epitaxy Edit Commercially GaN crystals can be grown using molecular beam epitaxy or metalorganic vapour phase epitaxy This process can be further modified to reduce dislocation densities First an ion beam is applied to the growth surface in order to create nanoscale roughness Then the surface is polished This process takes place in a vacuum Polishing methods typically employ a liquid electrolyte and UV irradiation to enable mechanical removal of a thin oxide layer from the wafer More recent methods have been developed which utilize solid state polymer electrolytes which are solvent free and require no radiation before polishing 59 Safety EditGaN dust is an irritant to skin eyes and lungs The environment health and safety aspects of gallium nitride sources such as trimethylgallium and ammonia and industrial hygiene monitoring studies of MOVPE sources have been reported in a 2004 review 60 Bulk GaN is non toxic and biocompatible 61 Therefore it may be used in the electrodes and electronics of implants in living organisms See also EditSchottky diode Semiconductor devices Molecular beam epitaxy Epitaxy Lithium ion batteryReferences Edit a b c Haynes William M ed 2011 CRC Handbook of Chemistry and Physics 92nd ed Boca Raton FL CRC Press p 4 64 ISBN 1 4398 5511 0 Harafuji Kenji Tsuchiya Taku Kawamura Katsuyuki 2004 Molecular dynamics simulation for evaluating melting point of wurtzite type GaN crystal Journal of Applied Physics 96 5 2501 Bibcode 2004JAP 96 2501H doi 10 1063 1 1772878 Foster Corey M Collazo Ramon Sitar Zlatko Ivanisevic Albena 2013 abstract NCSU study Aqueous Stability of Ga and N Polar Gallium Nitride Langmuir 29 1 216 220 doi 10 1021 la304039n PMID 23227805 Johan Strydom Michael de Rooij David Reusch Alex Lidow 2019 GaN Transistors for efficient power conversion 3 ed California USA Wiley p 3 ISBN 978 1 119 59442 0 Mion Christian 2005 Investigation of the Thermal Properties of Gallium Nitride Using the Three Omega Technique Thesis North Carolina State University Bougrov V Levinshtein M E Rumyantsev S L Zubrilov A in Properties of Advanced Semiconductor Materials GaN AlN InN BN SiC SiGe Eds Levinshtein M E Rumyantsev S L Shur M S John Wiley amp Sons Inc New York 2001 1 30 Haynes William M ed 2011 CRC Handbook of Chemistry and Physics 92nd ed Boca Raton FL CRC Press p 5 12 ISBN 1 4398 5511 0 Di Carlo A 2001 Tuning Optical Properties of GaN Based Nanostructures by Charge Screening Physica Status Solidi A 183 1 81 85 Bibcode 2001PSSAR 183 81D doi 10 1002 1521 396X 200101 183 1 lt 81 AID PSSA81 gt 3 0 CO 2 N Arakawa Y 2002 Progress in GaN based quantum dots for optoelectronics applications IEEE Journal of Selected Topics in Quantum Electronics 8 4 823 832 Bibcode 2002IJSTQ 8 823A doi 10 1109 JSTQE 2002 801675 Lidow Alexander Witcher J Brandon Smalley Ken March 2011 Enhancement Mode Gallium Nitride eGaN FET Characteristics under Long Term Stress PDF GOMAC Tech Conference Ahi Kiarash September 2017 Review of GaN based devices for terahertz operation Optical Engineering 56 9 090901 Bibcode 2017OptEn 56i0901A doi 10 1117 1 OE 56 9 090901 via SPIE Gallium Nitride as an Electromechanical Material R Z IEEE 2014 a b Akasaki I Amano H 1997 Crystal Growth and Conductivity Control of Group III Nitride Semiconductors and Their Application to Short Wavelength Light Emitters Japanese Journal of Applied Physics 36 9A 5393 Bibcode 1997JaJAP 36 5393A doi 10 1143 JJAP 36 5393 Wetzel C Suski T Ager J W III Fischer S Meyer B K Grzegory I Porowski S 1996 Strongly localized donor level in oxygen doped gallium nitride International conference on physics of semiconductors Berlin Germany 21 26 July 1996 a b c Amano H Kito M Hiramatsu K Akasaki I 1989 P Type Conduction in Mg Doped GaN Treated with Low Energy Electron Beam Irradiation LEEBI Japanese Journal of Applied Physics 28 12 L2112 Bibcode 1989JaJAP 28L2112A doi 10 1143 JJAP 28 L2112 Discovery in gallium nitride a key enabler of energy efficient electronics Cornell Chronicle Retrieved 20 October 2022 Terao S Iwaya M Nakamura R Kamiyama S Amano H Akasaki I 2001 Fracture of AlxGa1 xN GaN Heterostructure Compositional and Impurity Dependence Japanese Journal of Applied Physics 40 3A L195 Bibcode 2001JaJAP 40 195T doi 10 1143 JJAP 40 L195 S2CID 122191162 Preuss Paul 11 August 2000 Blue Diode Research Hastens Day of Large Scale Solid State Light Sources Berkeley Lab lbl gov Wraback M Shen H Carrano J C Collins C J Campbell J C Dupuis R D Schurman M J Ferguson I T 2000 Time Resolved Electroabsorption Measurement of the electron velocity field characteristic in GaN Applied Physics Letters 76 9 1155 1157 Bibcode 2000ApPhL 76 1155W doi 10 1063 1 125968 https www edn com a brief history of gallium nitride gan semiconductors Juza Robert Hahn Harry 1938 Uber die Kristallstrukturen von Cu3N GaN und InN Metallamide und Metallnitride Zeitschrift fur Anorganische und Allgemeine Chemie 239 3 282 287 doi 10 1002 zaac 19382390307 Amano H Sawaki N Akasaki I Toyoda Y 1986 Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer Applied Physics Letters 48 5 353 Bibcode 1986ApPhL 48 353A doi 10 1063 1 96549 S2CID 59066765 Amano H Asahi T Akasaki I 1990 Stimulated Emission Near Ultraviolet at Room Temperature from a GaN Film Grown on Sapphire by MOVPE Using an AlN Buffer Layer Japanese Journal of Applied Physics 29 2 L205 Bibcode 1990JaJAP 29L 205A doi 10 1143 JJAP 29 L205 S2CID 120489784 Akasaki I Amano H Sota S Sakai H Tanaka T Masayoshikoike 1995 Stimulated Emission by Current Injection from an AlGaN GaN GaInN Quantum Well Device Japanese Journal of Applied Physics 34 11B L1517 Bibcode 1995JaJAP 34L1517A doi 10 1143 JJAP 34 L1517 a b c Morkoc H Strite S Gao G B Lin M E Sverdlov B Burns M 1994 Large band gap SiC III V nitride and II VI ZnSe based semiconductor device technologies Journal of Applied Physics 76 3 1363 Bibcode 1994JAP 76 1363M doi 10 1063 1 358463 Dora Y Chakraborty A McCarthy L Keller S Denbaars S P Mishra U K 2006 High Breakdown Voltage Achieved on AlGaN GaN HEMTs with Integrated Slant Field Plates IEEE Electron Device Letters 27 9 713 Bibcode 2006IEDL 27 713D doi 10 1109 LED 2006 881020 S2CID 38268864 a b Why Gallium Nitride Asif Khan M Kuznia J N Bhattarai A R Olson D T 1993 Metal semiconductor field effect transistor based on single crystal GaN Applied Physics Letters 62 15 1786 Bibcode 1993ApPhL 62 1786A doi 10 1063 1 109549 a b Davis Sam March 2010 Enhancement Mode GaN MOSFET Delivers Impressive Performance Electronic Design 36 3 GaN on silicon enablingGaN power electronics but to capture less than 5 of LED making by 2020 PDF Compounds amp AdvancedSilicon SeminconductorTODAY 9 April May 2014 Rahbardar Mojaver Hassan Gosselin Jean Lou Valizadeh Pouya 27 June 2017 Use of a bilayer lattice matched AlInGaN barrier for improving the channel carrier confinement of enhancement mode AlInGaN GaN hetero structure field effect transistors Journal of Applied Physics 121 24 244502 Bibcode 2017JAP 121x4502R doi 10 1063 1 4989836 ISSN 0021 8979 GaN Power ICs Navitas GaN Integrated Circuits EPC HRL Laboratories claims first gallium nitride CMOS transistor fabrication Feb 2016 Apple 30W Compact GaN Charger Retrieved 30 April 2022 2010 IEEE Intl Symposium Technical Abstract Book Session TH3D pp 164 165 a b c Davis Sam 1 November 2009 SiC and GaN Vie for Slice of the Electric Vehicle Pie Power Electronics Retrieved 3 January 2016 These devices offer lower loss during power conversion and operational characteristics that surpass traditional silicon counterparts Making the new silicon Gallium nitride electronics could drastically cut energy usage Retrieved 28 June 2018 Meneghini Matteo Hilt Oliver Wuerfl Joachim Meneghesso Gaudenzio 25 January 2017 Technology and Reliability of Normally Off GaN HEMTs with p Type Gate Energies 10 2 153 doi 10 3390 en10020153 Gallium Nitride Based Modules Set New 180 Day Standard For High Power Operation Northrop Grumman 13 April 2011 Pocock Chris Export Market Strong for Thales Ground Radar Aviation International News Retrieved 28 May 2021 a b Brown Jack 16 October 2018 GaN Extends Range of Army s Q 53 Radar System Microwaves amp RF Retrieved 23 July 2019 Martin Lockheed U S Army Awards Lockheed Martin Contract Extending AN TPQ 53 Radar Range Lockheed Martin Retrieved 23 July 2019 Martin Lockheed AN TPQ 53 Radar System Lockheed Martin Retrieved 23 July 2019 Martin Lockheed Lockheed Martin Demonstrates Mature Proven Radar Technology During U S Army s Sense Off Lockheed Martin Retrieved 23 July 2019 Gripen C D Flies with Saab s new AESA Radar for the First Time Archived from the original on 2 May 2020 Saab first in its industry to bring GaN to market Archived from the original on 6 February 2016 Saab s Giraffe 1X Radar Offers a Man Portable 75km Detection Range Archived from the original on 23 August 2020 Saab Receives Swedish Order for Giraffe 4A and Arthur Radars Archived from the original on 5 December 2018 Arexis Outsmarting threats by electronic attack Archived from the original on 23 August 2020 Saab to Supply Key Components in Support of the U S Marine Corps Ground Air Task Oriented Radar G ATOR Program 12 February 2015 Archived from the original on 31 October 2020 Goldberger J He R Zhang Y Lee S Yan H Choi H J Yang P 2003 Single crystal gallium nitride nanotubes Nature 422 6932 599 602 Bibcode 2003Natur 422 599G doi 10 1038 nature01551 PMID 12686996 S2CID 4391664 Zhao Chao Alfaraj Nasir Subedi Ram Chandra Liang Jian Wei Alatawi Abdullah A Alhamoud Abdullah A Ebaid Mohamed Alias Mohd Sharizal Ng Tien Khee Ooi Boon S 2019 III nitride nanowires on unconventional substrates From materials to optoelectronic device applications Progress in Quantum Electronics 61 1 31 doi 10 1016 j pquantelec 2018 07 001 Ralf Riedel I Wei Chen 2015 Ceramics Science and Technology Volume 2 Materials and Properties Wiley Vch ISBN 978 3527802579 Jian Jang Huang Hao Chung Kuo Shyh Chiang Shen 2014 Nitride Semiconductor Light Emitting Diodes LEDs p 68 ISBN 978 0857099303 a href Template Cite book html title Template Cite book cite book a CS1 maint multiple names authors list link M Shibata T Furuya H Sakaguchi S Kuma 1999 Synthesis of gallium nitride by ammonia injection into gallium melt Journal of Crystal Growth 196 1 47 52 Bibcode 1999JCrGr 196 47S doi 10 1016 S0022 0248 98 00819 7 a href Template Cite journal html title Template Cite journal cite journal a CS1 maint multiple names authors list link US8357945B2 D Evelyn Mark Philip Park Dong Sil amp LeBoeuf Steven Francis et al Gallium nitride crystal and method of making same issued 2013 01 22 Google Patents patents google com Retrieved 20 October 2022 Murata Junji Nishiguchi Yoshito Iwasaki Takeshi 1 December 2018 Liquid electrolyte free electrochemical oxidation of GaN surface using a solid polymer electrolyte toward electrochemical mechanical polishing Electrochemistry Communications 97 110 113 doi 10 1016 j elecom 2018 11 006 ISSN 1388 2481 Shenai Khatkhate D V Goyette R J Dicarlo R L Jr Dripps G 2004 Environment health and safety issues for sources used in MOVPE growth of compound semiconductors Journal of Crystal Growth 272 1 4 816 21 Bibcode 2004JCrGr 272 816S doi 10 1016 j jcrysgro 2004 09 007 Shipman Matt and Ivanisevic Albena 24 October 2011 Research Finds Gallium Nitride is Non Toxic Biocompatible Holds Promise For Biomedical Implants North Carolina State UniversityExternal links Edit Wikimedia Commons has media related to Gallium nitride Ioffe data archive Retrieved from https en wikipedia org w index php title Gallium nitride amp oldid 1161996983, wikipedia, wiki, book, books, library,

article

, read, download, free, free download, mp3, video, mp4, 3gp, jpg, jpeg, gif, png, picture, music, song, movie, book, game, games.