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Electrochemical RAM

Electrochemical Random-Access Memory (ECRAM) is a type of non-volatile memory (NVM) with multiple levels per cell (MLC) designed for deep learning analog acceleration.[1][2][3] An ECRAM cell is a three-terminal device composed of a conductive channel, an insulating electrolyte, an ionic reservoir, and metal contacts. The resistance of the channel is modulated by ionic exchange at the interface between the channel and the electrolyte upon application of an electric field. The charge-transfer process allows both for state retention in the absence of applied power, and for programming of multiple distinct levels, both differentiating ECRAM operation from that of a field-effect transistor (FET). The write operation is deterministic and can result in symmetrical potentiation and depression, making ECRAM arrays attractive for acting as artificial synaptic weights in physical implementations of artificial neural networks (ANN). The technological challenges include open circuit potential (OCP) and semiconductor foundry compatibility associated with energy materials. Universities, government laboratories, and corporate research teams have contributed to the development of ECRAM for analog computing. Notably, Sandia National Laboratories designed a lithium-based cell inspired by solid-state battery materials,[4] Stanford University built an organic proton-based cell,[5] and International Business Machines (IBM) demonstrated in-memory selector-free parallel programming for a logistic regression task in an array of metal-oxide ECRAM designed for insertion in the back end of line (BEOL).[6] In 2022, researchers at Massachusetts Institute of Technology built an inorganic, CMOS-compatible protonic technology that achieved near-ideal modulation characteristics using nanosecond fast pulses [7]

Operation edit

 
ECRAM synaptic cell layout and operating principle

Write edit

Stress to the gate, relative to channel electrodes, can be applied in the form of fixed current or bias, driving ions toward - or away from - the electrolyte/channel interface where charge transfer occurs with free carriers. Upon insertion in the channel, the ionic charge is neutralized and the atomic species intercalate or bind to the conductive host matrix, in some cases yielding strain and localized phase transformation. Such reversible processes are equivalent to anodic/cathodic reactions in battery cells or electrochromic devices. Although in ECRAM, the programming of the memory element is defined not as a change in capacity or opacity, but by a change of channel conductivity associated with atomic species being inserted or removed as a result of the stress signal.

Read edit

The read operation is decoupled from the write operation thanks to the presence of three electrodes, therefore limiting read disturb. A small bias is applied between the channel electrodes, with the resulting read current being proportional to the channel conductivity, hence sensing the programmed state of the device.

Speed edit

The programming speed of ECRAM cells is not limited by the bulk diffusion of ions. They indeed only need to cross the interface plane between the electrolyte and the channel to induce a change in conductivity. Nanosecond write pulses can indeed trigger programming.[8] Trade-offs between gate capacitance, electronic conductivity, etc., can yield settling transients, limiting the maximum read-write frequency.[9]

Arrays edit

ECRAM arrays are integrated in a pseudo-crossbar layout, the gate access line being common to all devices in a row or column. If a change in electrochemical potential, the driving force of a battery, occurs upon ionic exchange between channel and gate electrode, an open circuit potential (OCP) exists at the gate contact and will differ device to device depending on the programmed state. To prevent cross-talk between cells sharing a gate line, an access device to isolate each one is added in series with the memory element.[10] Suppressing OCP in the ECRAM design, minimizes the cell size/complexity, allowing for selector-free parallel read/programming of device arrays.[6]

Synaptic function edit

 
(Left) Illustration of analog matrix-vector multiply operation in a pseudo-crossbar ecram array. (Right) Illustration of the programming of 50 distinct and reversible states in the ecram synaptic cell.

Principle edit

Non-volatile memory (NVM) can be leveraged for in-memory compute, thereby reducing the frequency of data transfer between storage and processing units. This can ultimately improve compute time and energy efficiency over hierarchical system architectures by eliminating the Von Neumann bottleneck. Hence, when using multi-level cells (MLC) at the nodes of cross-bar arrays, one can perform analog operations on time or voltage encoded data such as vector (row input signal) × matrix (memory array) multiply. Following Kirchhoff's and Ohm's laws, the resulting vector is then obtained by integrating the current collected at each column. For ECRAM cells, an additional line is added at each row to write the cells during programming cycles, thereby yielding a pseudo-crossbar architecture. In the field of artificial intelligence (AI), deep neural networks (DNN) are used for classification and learning tasks, relying on a large number of matrix-multiply operations. Therefore, analog compute with NVM technology for such tasks are extremely attractive. ECRAM cells are uniquely positioned for use in analog deep learning accelerators due to their inherent deterministic and symmetric programming nature when compared to other devices such as resistive RAM (ReRAM or RRAM) and phase-change memory (PCM).

Requirements edit

Metric Unit NVM synaptic
cell target[11]
G range nS 9-72
on/off ratio n.a. 8
# of states n.a. 1000
up/down asymmetry % 5
write time ns 1

Physical implementation of artificial neural networks (ANN) must perform at iso-accuracy when benchmarked against floating point precision weights in software. This sets the boundary for device properties needed for analog deep learning accelerators. In the design of their resisistive processing unit (RPU), IBM Research has published such requirements,[11] a subset of which is listed here. Algorithm and hardware co-design can relax them somewhat but not without other trade-offs.[12]

NVM use as synaptic weights in lieu of storage implies significantly different requirements when it comes to target resistance range, number of levels, and programming speed and symmetry. Because the in-memory computation occurs in parallel through the array, many devices are addressed concurrently and therefore need to have a high average resistance to limit energy dissipation. To perform high-accuracy computation and be resilient to noise, the NVM cell needs a large number of distinct states. The programming time needs only to be fast between levels, not from the highest to the lowest resistance states. During each programming cycle (back-propagation), weight updates can be negative or positive, and the up/down traces therefore need symmetry to allow learning algorithms to converge. All NVM technologies do struggle with these targets. ECRAM individual cells can meet such stringent metrics,[6] but also need to demonstrate high-density array yield and stochasticity.

Demos with ECRAM Synaptic Arrays edit

Sandia National Laboratories edit

As reported in a 2019 publication in Science, by Elliot J. Fuller, Alec A. Talin, et al. from Sandia National Laboratories, in collaboration with Stanford University, and the University of Massachusetts Amherst:[10]

Using co-planar organic multilevel cells, isolated by conductive bridge memory (CBM) devices, the team demonstrates parallel programming and addressing in up to 3×3 arrays. In particular a 2-layer neural network is mapped to the array by transferring the weights necessary to perform an inference task resulting in a XOR operation on the binary input vector.

Individual cells are shown to have the following properties (not all achieved in the same device configuration); speed = 1 MHz read-write cycles, number of states > 50 (tunable), resistance range = 50-100 nS (tunable), endurance > 108 write ops, size = 50×50 μm2.

IBM Research edit

As reported in a 2019 proceeding of the IEEE International Electron Device Meeting (IEDM), by Seyoung Kim, John Rozen, et al. from IBM Research:[6]

Using metal-oxide ECRAM cells, selector-free, the team demonstrates parallel programming and addressing in 2×2 arrays. In particular, a logistic regression task is performed in-memory with 1,000 2×1 vectors as training set. 2D curve fit is achieved in a dozen epochs.

Individual cells are shown to have the following properties (not all achieved in the same device configuration); speed = 10 ns write pulses, number of states > 1,000 (tunable), resistance range = 0-50 μS (tunable), endurance > 107 write ops, size < 1×1 μm2.

Cell implementations edit

Various institutions have demonstrated ECRAM cells with vastly different materials, layouts, and performances.
An example set for discrete cells is listed in the table.

Ion Channel Device Size Write Pulse Length Reference
Li+
WO
3
100 x 100 nm2 5 ns [8]
Li+
Li
1−x
CO
2
~1 mm2 0.5 s [4]
Li+
Graphene 36 μm2 10 ms [13]
Li+
α-MO
3
~1 mm2 10 ms [14]
H+
PEDOT:PSS 0.001 mm2 5 ms [5]
H+
WO
3
0.05 mm2 5 ms [15]
H+
WO
3
0.025 mm2 210 ms [16]
H+
WO
3
0.01 mm2 0.1 s [17]
H+ 2D MXene 100 μm2 200 ns [18]

Li-ECRAM edit

Based on lithium ions, Li-ECRAM devices have demonstrated repeatable and controlled switching by applying known materials from battery technology to the memory design.[4][13][14] Consequently, such cells can exhibit an OCP which varies over several volts, depending on the programmed state.

H-ECRAM edit

Based on hydrogen ions, H-ECRAM devices have proven fast, necessitating small driving forces to induce programming.[5][15][16] High diffusion coefficients in various materials can be accompanied by lack of retention within the memory cell, impacting endurance. Most H-ECRAM designs use liquid and/or organic electrolytes. In a 2022 study, researchers at Massachusetts Institute of Technology demonstrated a CMOS-compatible technology based on phosphosilicate glass electrolyte that achieved ultrafast modulation characteristics with high energy efficiency.[7] The same year researchers at the Royal Institute of Technology KTH showed ECRAMS based on hydrogen intercalation into the 2D material MXene, marking the first demonstration of high speed 2D ECRAMs. [18]

MO-ECRAM edit

Metal-oxide based ECRAM, are inspired from OxRam materials and high-k/metal gate technology used in commercial semiconductor offerings. MO-ECRAM do enable negligible OCP and sub-μs write operations.[6]

VLSI edit

 
Processed 200mm si wafer

For advanced semiconductor memory or compute applications, a technology needs to be compatible with very large scale integration (VLSI). This puts constraints on materials used, and the techniques employed to fabricate functional devices. The implications for ECRAM are described here.

Semiconductor foundry edit

A semiconductor foundry can handle several technologies and has strict rules when it comes to materials being introduced in its expensive toolset to avoid cross-contamination and loss of device yield. In particular, metallic mobile ions, if present in active areas, can induce device drift and affect reliability. There are several other considerations for the foundries; including safety, cost, volume, etc. Hence, lithium ion-based Li-ECRAM faces unique challenges beyond the presence of OCP.

Back end of line (BEOL) edit

Memory arrays require logic periphery to operate and interface with the rest of the compute system. Such periphery is based on field-effect transistors (FETs) built on the surface of silicon wafer substrates with a high thermal budget at the front end of line (FEOL). Memory cells can be inserted between upper metal levels at back end of line (BEOL) but will still need to remain unaffected by temperatures up to ~400 °C used in subsequent steps. Together with high density patterning challenges, these restrictions make organic devices unsuitable for such integration. The ECRAMs based on 2D MXene materials [18] have shown the potential to be unaffected by 400 °C heating, but additional development is needed for the integration of ion conductors.

Heterogeneous integration (HI) edit

One way to introduce novel memory materials can be to use heterogeneous integration (HI) where the device array is fabricated independently from the logic controls and then bonded to the FET-containing chip to enable its use as high bandwidth memory (HBM). However, the cost and complexity associated with such scheme negatively affects the value proposition for displacing existing memory technologies.

References edit

  1. ^ Shi, J.; Ha, S. D.; Zhou, Y.; Schoofs, F.; Ramanathan, S. (2013). "A correlated nickelate synaptic transistor". Nature Communications. 4: 2676. Bibcode:2013NatCo...4.2676S. doi:10.1038/ncomms3676. PMID 24177330.
  2. ^ Tang, Jianshi; Bishop, Douglas; Kim, Seyoung; Copel, Matt; Gokmen, Tayfun; Todorov, Teodor; Shin, SangHoon; Lee, Ko-Tao; Solomon, Paul (2018-12-01). "ECRAM as Scalable Synaptic Cell for High-Speed, Low-Power Neuromorphic Computing". 2018 IEEE International Electron Devices Meeting (IEDM). pp. 13.1.1–4. doi:10.1109/IEDM.2018.8614551. ISBN 978-1-7281-1987-8. S2CID 58674536. Retrieved 2020-07-16.
  3. ^ "Finite element modeling of electrochemical random access memory - iis-projects". iis-projects.ee.ethz.ch. Zürich, Switzerland: ETH Zurich. Retrieved 2020-07-16.
  4. ^ a b c 'E. J. Fuller et al., Adv. Mater., 29, 1604310 (2017)
  5. ^ a b c Y. van de Burgt et al., Nature Electronics, 1, 386 (2018)
  6. ^ a b c d e Kim, S. (2019). "Metal-oxide based, CMOS-compatible ECRAM for Deep Learning Accelerator". 2019 IEEE International Electron Devices Meeting (IEDM). pp. 35.7.1–4. doi:10.1109/IEDM19573.2019.8993463. ISBN 978-1-7281-4032-2. S2CID 211211273.
  7. ^ a b Onen, Murat; Emond, Nicolas; Wang, Baoming; Zhang, Difei; Ross, Frances M.; Li, Ju; Yildiz, Bilge; del Alamo, Jesús A. (29 July 2022). "Nanosecond protonic programmable resistors for analog deep learning". Science. 377 (6605): 539–543. doi:10.1126/science.abp8064. ISSN 0036-8075. PMID 35901152. S2CID 251159631.
  8. ^ a b Tang, J. (2018). "ECRAM as Scalable Synaptic Cell for High-Speed, Low-Power Neuromorphic Computing". 2018 IEEE International Electron Devices Meeting (IEDM). pp. 13.1.1–4. doi:10.1109/IEDM.2018.8614551. ISBN 978-1-7281-1987-8. S2CID 58674536.
  9. ^ D. Bishop et al., proceedings of the international conference in Solid-State Devices and Materials (SSDM), pp. 23-24 (2018)
  10. ^ a b Fuller, E.J.; Keene, S.T.; Melianas, A.; Wang, Z.; Agarwal, S.; Li, Y.; Tuchman, Y.; James, C.D.; Marinella, M.J.; Yang, J.J.; Salleo, A.; Talin, A.A. (2019). "Parallel programming of an ionic floating-gate memory array for scalable neuromorphic computing". Science. 364 (6440): 570–4. Bibcode:2019Sci...364..570F. doi:10.1126/science.aaw5581. PMID 31023890. S2CID 133605392.
  11. ^ a b Tayfun, G.; Yurii, V. (2016). "Acceleration of Deep Neural Network Training with Resistive Cross-Point Devices: Design Considerations". Frontiers in Neuroscience. 10: 333. doi:10.3389/fnins.2016.00333. PMC 4954855. PMID 27493624.
  12. ^ Tayfun, G.; Haensch, H. (2020). "Algorithm for Training Neural Networks on Resistive Device Arrays". Frontiers in Neuroscience. 14: 103. doi:10.3389/fnins.2020.00103. PMC 7054461. PMID 32174807.
  13. ^ a b Sharbati, M.T.; Du, Y.; Torres, J.; Ardolino, N.D.; Yun, M.; Xiong, F. (2018). "Artificial Synapses: Low-Power, Electrochemically Tunable Graphene Synapses for Neuromorphic Computing". Adv. Mater. 30: 1870273. doi:10.1002/adma.201870273.
  14. ^ a b Yang, C.-S.; Shang, D.-S.; Liu, N.; Fuller, E.J.; Agrawal, S.; Alec Talin, A.; Li, Y.-Q.; Shen, B.-G.; Sun, Y. (2018). "All-Solid-State Synaptic Transistor with Ultralow Conductance for Neuromorphic Computing". Adv. Funct. Mater. 28 (42): 1804170. doi:10.1002/adfm.201804170. OSTI 1472248. S2CID 104934211.
  15. ^ a b Yao, X.; Klyukin, K.; Lu, W. (2020). "Protonic solid-state electrochemical synapse for physical neural networks". Nat Commun. 11 (1): 3134. Bibcode:2020NatCo..11.3134Y. doi:10.1038/s41467-020-16866-6. PMC 7371700. PMID 32561717.
  16. ^ a b Yang, J.-T.; Ge, C.; Du, J.-Y.; Huang, H.-Y.; He, M.; Wang, C.; Lu, H.-B.; Yang, G.-Z.; Jin, K.-J. (2018). "Artificial Synapses Emulated by an Electrolyte-Gated Tungsten-Oxide Transistor". Adv. Mater. 30 (34): 1801548. doi:10.1002/adma.201801548. PMID 29974526. S2CID 49655665.
  17. ^ J. Lee et al., proceedings of the IEEE international Silicon Nanoelectronics Workshop (SNW), pp. 31-32 (2018)
  18. ^ a b c Melianas, Armantas; Kang, Min‐A; VahidMohammadi, Armin; Quill, Tyler James; Tian, Weiqian; Gogotsi, Yury; Salleo, Alberto; Hamedi, Mahiar Max (March 2022). "High‐Speed Ionic Synaptic Memory Based on 2D Titanium Carbide MXene". Advanced Functional Materials. 32 (12): 2109970. doi:10.1002/adfm.202109970. ISSN 1616-301X. S2CID 244484634.

External links edit

  • Moore, S.K. (11 December 2018). "Searching for the Perfect Artificial Synapse for AI". IEEE Spectrum.
  • Ambrogio, S.; Adusumilli, P.; Eleftheriou, E. (11 December 2019). "The path to the "perfect" analog material and system: IBM at IEDM and NeurIPS". IBM Research Blog.
  • Chandler, D.L. (19 June 2020). "Engineers design a device that operates like a brain synapse". MIT News.
  • Kubota, T. (25 April 2019). "Stanford researchers' artificial synapse is fast, efficient and durable". Stanford News.
  • "Sandia Powers Breakthroughs in Neuromorphic Computing". inside HPC. 1 May 2019.

electrochemical, electrochemical, synapse, redirects, here, synapses, brain, synapse, electrochemical, random, access, memory, ecram, type, volatile, memory, with, multiple, levels, cell, designed, deep, learning, analog, acceleration, ecram, cell, three, term. Electrochemical synapse redirects here For synapses in the brain see Synapse Electrochemical Random Access Memory ECRAM is a type of non volatile memory NVM with multiple levels per cell MLC designed for deep learning analog acceleration 1 2 3 An ECRAM cell is a three terminal device composed of a conductive channel an insulating electrolyte an ionic reservoir and metal contacts The resistance of the channel is modulated by ionic exchange at the interface between the channel and the electrolyte upon application of an electric field The charge transfer process allows both for state retention in the absence of applied power and for programming of multiple distinct levels both differentiating ECRAM operation from that of a field effect transistor FET The write operation is deterministic and can result in symmetrical potentiation and depression making ECRAM arrays attractive for acting as artificial synaptic weights in physical implementations of artificial neural networks ANN The technological challenges include open circuit potential OCP and semiconductor foundry compatibility associated with energy materials Universities government laboratories and corporate research teams have contributed to the development of ECRAM for analog computing Notably Sandia National Laboratories designed a lithium based cell inspired by solid state battery materials 4 Stanford University built an organic proton based cell 5 and International Business Machines IBM demonstrated in memory selector free parallel programming for a logistic regression task in an array of metal oxide ECRAM designed for insertion in the back end of line BEOL 6 In 2022 researchers at Massachusetts Institute of Technology built an inorganic CMOS compatible protonic technology that achieved near ideal modulation characteristics using nanosecond fast pulses 7 Contents 1 Operation 1 1 Write 1 2 Read 1 3 Speed 1 4 Arrays 2 Synaptic function 2 1 Principle 2 2 Requirements 2 3 Demos with ECRAM Synaptic Arrays 2 3 1 Sandia National Laboratories 2 3 2 IBM Research 3 Cell implementations 3 1 Li ECRAM 3 2 H ECRAM 3 3 MO ECRAM 4 VLSI 4 1 Semiconductor foundry 4 2 Back end of line BEOL 4 3 Heterogeneous integration HI 5 References 6 External linksOperation edit nbsp ECRAM synaptic cell layout and operating principle Write edit Stress to the gate relative to channel electrodes can be applied in the form of fixed current or bias driving ions toward or away from the electrolyte channel interface where charge transfer occurs with free carriers Upon insertion in the channel the ionic charge is neutralized and the atomic species intercalate or bind to the conductive host matrix in some cases yielding strain and localized phase transformation Such reversible processes are equivalent to anodic cathodic reactions in battery cells or electrochromic devices Although in ECRAM the programming of the memory element is defined not as a change in capacity or opacity but by a change of channel conductivity associated with atomic species being inserted or removed as a result of the stress signal Read edit The read operation is decoupled from the write operation thanks to the presence of three electrodes therefore limiting read disturb A small bias is applied between the channel electrodes with the resulting read current being proportional to the channel conductivity hence sensing the programmed state of the device Speed edit The programming speed of ECRAM cells is not limited by the bulk diffusion of ions They indeed only need to cross the interface plane between the electrolyte and the channel to induce a change in conductivity Nanosecond write pulses can indeed trigger programming 8 Trade offs between gate capacitance electronic conductivity etc can yield settling transients limiting the maximum read write frequency 9 Arrays edit ECRAM arrays are integrated in a pseudo crossbar layout the gate access line being common to all devices in a row or column If a change in electrochemical potential the driving force of a battery occurs upon ionic exchange between channel and gate electrode an open circuit potential OCP exists at the gate contact and will differ device to device depending on the programmed state To prevent cross talk between cells sharing a gate line an access device to isolate each one is added in series with the memory element 10 Suppressing OCP in the ECRAM design minimizes the cell size complexity allowing for selector free parallel read programming of device arrays 6 Synaptic function edit nbsp Left Illustration of analog matrix vector multiply operation in a pseudo crossbar ecram array Right Illustration of the programming of 50 distinct and reversible states in the ecram synaptic cell Principle edit Non volatile memory NVM can be leveraged for in memory compute thereby reducing the frequency of data transfer between storage and processing units This can ultimately improve compute time and energy efficiency over hierarchical system architectures by eliminating the Von Neumann bottleneck Hence when using multi level cells MLC at the nodes of cross bar arrays one can perform analog operations on time or voltage encoded data such as vector row input signal matrix memory array multiply Following Kirchhoff s and Ohm s laws the resulting vector is then obtained by integrating the current collected at each column For ECRAM cells an additional line is added at each row to write the cells during programming cycles thereby yielding a pseudo crossbar architecture In the field of artificial intelligence AI deep neural networks DNN are used for classification and learning tasks relying on a large number of matrix multiply operations Therefore analog compute with NVM technology for such tasks are extremely attractive ECRAM cells are uniquely positioned for use in analog deep learning accelerators due to their inherent deterministic and symmetric programming nature when compared to other devices such as resistive RAM ReRAM or RRAM and phase change memory PCM Requirements edit Metric Unit NVM synaptic cell target 11 G range nS 9 72 on off ratio n a 8 of states n a 1000 up down asymmetry 5 write time ns 1 Physical implementation of artificial neural networks ANN must perform at iso accuracy when benchmarked against floating point precision weights in software This sets the boundary for device properties needed for analog deep learning accelerators In the design of their resisistive processing unit RPU IBM Research has published such requirements 11 a subset of which is listed here Algorithm and hardware co design can relax them somewhat but not without other trade offs 12 NVM use as synaptic weights in lieu of storage implies significantly different requirements when it comes to target resistance range number of levels and programming speed and symmetry Because the in memory computation occurs in parallel through the array many devices are addressed concurrently and therefore need to have a high average resistance to limit energy dissipation To perform high accuracy computation and be resilient to noise the NVM cell needs a large number of distinct states The programming time needs only to be fast between levels not from the highest to the lowest resistance states During each programming cycle back propagation weight updates can be negative or positive and the up down traces therefore need symmetry to allow learning algorithms to converge All NVM technologies do struggle with these targets ECRAM individual cells can meet such stringent metrics 6 but also need to demonstrate high density array yield and stochasticity Demos with ECRAM Synaptic Arrays edit Sandia National Laboratories edit As reported in a 2019 publication in Science by Elliot J Fuller Alec A Talin et al from Sandia National Laboratories in collaboration with Stanford University and the University of Massachusetts Amherst 10 Using co planar organic multilevel cells isolated by conductive bridge memory CBM devices the team demonstrates parallel programming and addressing in up to 3 3 arrays In particular a 2 layer neural network is mapped to the array by transferring the weights necessary to perform an inference task resulting in a XOR operation on the binary input vector Individual cells are shown to have the following properties not all achieved in the same device configuration speed 1 MHz read write cycles number of states gt 50 tunable resistance range 50 100 nS tunable endurance gt 108 write ops size 50 50 mm2 IBM Research edit As reported in a 2019 proceeding of the IEEE International Electron Device Meeting IEDM by Seyoung Kim John Rozen et al from IBM Research 6 Using metal oxide ECRAM cells selector free the team demonstrates parallel programming and addressing in 2 2 arrays In particular a logistic regression task is performed in memory with 1 000 2 1 vectors as training set 2D curve fit is achieved in a dozen epochs Individual cells are shown to have the following properties not all achieved in the same device configuration speed 10 ns write pulses number of states gt 1 000 tunable resistance range 0 50 mS tunable endurance gt 107 write ops size lt 1 1 mm2 Cell implementations editVarious institutions have demonstrated ECRAM cells with vastly different materials layouts and performances An example set for discrete cells is listed in the table Ion Channel Device Size Write Pulse Length Reference Li WO3 100 x 100 nm2 5 ns 8 Li Li1 x CO2 1 mm2 0 5 s 4 Li Graphene 36 mm2 10 ms 13 Li a MO3 1 mm2 10 ms 14 H PEDOT PSS 0 001 mm2 5 ms 5 H WO3 0 05 mm2 5 ms 15 H WO3 0 025 mm2 210 ms 16 H WO3 0 01 mm2 0 1 s 17 H 2D MXene 100 mm2 200 ns 18 Li ECRAM edit Based on lithium ions Li ECRAM devices have demonstrated repeatable and controlled switching by applying known materials from battery technology to the memory design 4 13 14 Consequently such cells can exhibit an OCP which varies over several volts depending on the programmed state H ECRAM edit Based on hydrogen ions H ECRAM devices have proven fast necessitating small driving forces to induce programming 5 15 16 High diffusion coefficients in various materials can be accompanied by lack of retention within the memory cell impacting endurance Most H ECRAM designs use liquid and or organic electrolytes In a 2022 study researchers at Massachusetts Institute of Technology demonstrated a CMOS compatible technology based on phosphosilicate glass electrolyte that achieved ultrafast modulation characteristics with high energy efficiency 7 The same year researchers at the Royal Institute of Technology KTH showed ECRAMS based on hydrogen intercalation into the 2D material MXene marking the first demonstration of high speed 2D ECRAMs 18 MO ECRAM edit Metal oxide based ECRAM are inspired from OxRam materials and high k metal gate technology used in commercial semiconductor offerings MO ECRAM do enable negligible OCP and sub ms write operations 6 VLSI edit nbsp Processed 200mm si wafer For advanced semiconductor memory or compute applications a technology needs to be compatible with very large scale integration VLSI This puts constraints on materials used and the techniques employed to fabricate functional devices The implications for ECRAM are described here Semiconductor foundry edit A semiconductor foundry can handle several technologies and has strict rules when it comes to materials being introduced in its expensive toolset to avoid cross contamination and loss of device yield In particular metallic mobile ions if present in active areas can induce device drift and affect reliability There are several other considerations for the foundries including safety cost volume etc Hence lithium ion based Li ECRAM faces unique challenges beyond the presence of OCP Back end of line BEOL edit Memory arrays require logic periphery to operate and interface with the rest of the compute system Such periphery is based on field effect transistors FETs built on the surface of silicon wafer substrates with a high thermal budget at the front end of line FEOL Memory cells can be inserted between upper metal levels at back end of line BEOL but will still need to remain unaffected by temperatures up to 400 C used in subsequent steps Together with high density patterning challenges these restrictions make organic devices unsuitable for such integration The ECRAMs based on 2D MXene materials 18 have shown the potential to be unaffected by 400 C heating but additional development is needed for the integration of ion conductors Heterogeneous integration HI edit One way to introduce novel memory materials can be to use heterogeneous integration HI where the device array is fabricated independently from the logic controls and then bonded to the FET containing chip to enable its use as high bandwidth memory HBM However the cost and complexity associated with such scheme negatively affects the value proposition for displacing existing memory technologies References edit Shi J Ha S D Zhou Y Schoofs F Ramanathan S 2013 A correlated nickelate synaptic transistor Nature Communications 4 2676 Bibcode 2013NatCo 4 2676S doi 10 1038 ncomms3676 PMID 24177330 Tang Jianshi Bishop Douglas Kim Seyoung Copel Matt Gokmen Tayfun Todorov Teodor Shin SangHoon Lee Ko Tao Solomon Paul 2018 12 01 ECRAM as Scalable Synaptic Cell for High Speed Low Power Neuromorphic Computing 2018 IEEE International Electron Devices Meeting IEDM pp 13 1 1 4 doi 10 1109 IEDM 2018 8614551 ISBN 978 1 7281 1987 8 S2CID 58674536 Retrieved 2020 07 16 Finite element modeling of electrochemical random access memory iis projects iis projects ee ethz ch Zurich Switzerland ETH Zurich Retrieved 2020 07 16 a b c E J Fuller et al Adv Mater 29 1604310 2017 a b c Y van de Burgt et al Nature Electronics 1 386 2018 a b c d e Kim S 2019 Metal oxide based CMOS compatible ECRAM for Deep Learning Accelerator 2019 IEEE International Electron Devices Meeting IEDM pp 35 7 1 4 doi 10 1109 IEDM19573 2019 8993463 ISBN 978 1 7281 4032 2 S2CID 211211273 a b Onen Murat Emond Nicolas Wang Baoming Zhang Difei Ross Frances M Li Ju Yildiz Bilge del Alamo Jesus A 29 July 2022 Nanosecond protonic programmable resistors for analog deep learning Science 377 6605 539 543 doi 10 1126 science abp8064 ISSN 0036 8075 PMID 35901152 S2CID 251159631 a b Tang J 2018 ECRAM as Scalable Synaptic Cell for High Speed Low Power Neuromorphic Computing 2018 IEEE International Electron Devices Meeting IEDM pp 13 1 1 4 doi 10 1109 IEDM 2018 8614551 ISBN 978 1 7281 1987 8 S2CID 58674536 D Bishop et al proceedings of the international conference in Solid State Devices and Materials SSDM pp 23 24 2018 a b Fuller E J Keene S T Melianas A Wang Z Agarwal S Li Y Tuchman Y James C D Marinella M J Yang J J Salleo A Talin A A 2019 Parallel programming of an ionic floating gate memory array for scalable neuromorphic computing Science 364 6440 570 4 Bibcode 2019Sci 364 570F doi 10 1126 science aaw5581 PMID 31023890 S2CID 133605392 a b Tayfun G Yurii V 2016 Acceleration of Deep Neural Network Training with Resistive Cross Point Devices Design Considerations Frontiers in Neuroscience 10 333 doi 10 3389 fnins 2016 00333 PMC 4954855 PMID 27493624 Tayfun G Haensch H 2020 Algorithm for Training Neural Networks on Resistive Device Arrays Frontiers in Neuroscience 14 103 doi 10 3389 fnins 2020 00103 PMC 7054461 PMID 32174807 a b Sharbati M T Du Y Torres J Ardolino N D Yun M Xiong F 2018 Artificial Synapses Low Power Electrochemically Tunable Graphene Synapses for Neuromorphic Computing Adv Mater 30 1870273 doi 10 1002 adma 201870273 a b Yang C S Shang D S Liu N Fuller E J Agrawal S Alec Talin A Li Y Q Shen B G Sun Y 2018 All Solid State Synaptic Transistor with Ultralow Conductance for Neuromorphic Computing Adv Funct Mater 28 42 1804170 doi 10 1002 adfm 201804170 OSTI 1472248 S2CID 104934211 a b Yao X Klyukin K Lu W 2020 Protonic solid state electrochemical synapse for physical neural networks Nat Commun 11 1 3134 Bibcode 2020NatCo 11 3134Y doi 10 1038 s41467 020 16866 6 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