Fluorosilicate glass (FSG) is a glass material composed primarily of fluorine, silicon and oxygen. It has a number of uses in industry and manufacturing, especially in semiconductor fabrication where it forms an insulating dielectric. The related fluorosilicate glass-ceramics have good mechanical and chemical properties.
Fluorosilicate glass-ceramics are crystalline or semi-crystalline solids formed by careful cooling of molten fluorosilicate glass. They have good mechanical properties.
Potassium fluororichterite based materials are composed from tiny interlocked rod-shaped amphibole crystals; they have good resistance to chemicals and can be used in microwave ovens. Richterite glass-ceramics are used for high-performance tableware.
Fluorosilicate glass-ceramics with sheet structure, derived from mica, are strong and machinable. They find a number of uses and can be used in high vacuum and as dielectrics and precision ceramic components. A number of mica and mica-fluoroapatite glass-ceramics were studied as biomaterials.[3]
fluorosilicate, glass, glass, material, composed, primarily, fluorine, silicon, oxygen, number, uses, industry, manufacturing, especially, semiconductor, fabrication, where, forms, insulating, dielectric, related, fluorosilicate, glass, ceramics, have, good, m. Fluorosilicate glass FSG is a glass material composed primarily of fluorine silicon and oxygen It has a number of uses in industry and manufacturing especially in semiconductor fabrication where it forms an insulating dielectric The related fluorosilicate glass ceramics have good mechanical and chemical properties Contents 1 Semiconductor fabrication 2 Fluorosilicate glass ceramics 3 See also 4 ReferencesSemiconductor fabrication editFSG has a small relative dielectric constant low k dielectric and is used in between metal copper interconnect layers during silicon integrated circuit fabrication process It is widely used by semiconductor fabrication plants on geometries under 0 25 microns m FSG is effectively a fluorine containing silicon dioxide k 3 5 while k of undoped silicon dioxide is 3 9 1 FSG is used by IBM 2 Intel started using Cu metal layers and FSG on its 1 2 GHz Pentium processor at 130 nm complementary metal oxide semiconductor CMOS Taiwan Semiconductor Manufacturing Company TSMC combined FSG and copper in the Altera APEX Fluorosilicate glass ceramics editFluorosilicate glass ceramics are crystalline or semi crystalline solids formed by careful cooling of molten fluorosilicate glass They have good mechanical properties Potassium fluororichterite based materials are composed from tiny interlocked rod shaped amphibole crystals they have good resistance to chemicals and can be used in microwave ovens Richterite glass ceramics are used for high performance tableware Fluorosilicate glass ceramics with sheet structure derived from mica are strong and machinable They find a number of uses and can be used in high vacuum and as dielectrics and precision ceramic components A number of mica and mica fluoroapatite glass ceramics were studied as biomaterials 3 See also editFluoride glass Glass SilicateReferences edit Committee E D F A S D R 2004 Microelectronics Failure Analysis Desk Reference ASM International ISBN 9780871708045 Retrieved 2015 04 13 Soltis F G 2001 Fortress Rochester The Inside Story of the IBM ISeries News 400 Books p 54 ISBN 9781583040836 Retrieved 2015 04 13 Martin J W 2006 Concise Encyclopedia of the Structure of Materials Elsevier Science p 203 ISBN 9780080524634 Retrieved 2015 04 13 This glass material related article is a stub You can help Wikipedia by expanding it vte nbsp This article related to medical technology is a stub You can help Wikipedia by expanding it vte Retrieved from https en wikipedia org w index php title Fluorosilicate glass amp oldid 1166160791, wikipedia, wiki, book, books, library,
