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MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows:
1st Generation
MEMS sensor element mostly based on a silicon structure, sometimes combined with analog amplification on a micro chip.[1]
Fusion of the sensor element with analog amplification, analog-to-digital converter and digital intelligence for linearization and temperature compensation on the same micro chip.
4th Generation
Memory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation.
ReferencesEdit
^Terry, S.C.; Jerman, J.H.; Angell, J.B. (December 1979). "A gas chromatographic air analyzer fabricated on a silicon wafer". IEEE Transactions on Electron Devices. 26 (12): 1880–1886. doi:10.1109/T-ED.1979.19791.
October 20, 2023
mems, sensor, generations, this, article, relies, largely, entirely, single, source, relevant, discussion, found, talk, page, please, help, improve, this, article, introducing, citations, additional, sources, find, sources, news, newspapers, books, scholar, js. This article relies largely or entirely on a single source Relevant discussion may be found on the talk page Please help improve this article by introducing citations to additional sources Find sources MEMS sensor generations news newspapers books scholar JSTOR February 2017 MEMS sensor generations represent the progress made in micro sensor technology and can be categorized as follows 1st Generation MEMS sensor element mostly based on a silicon structure sometimes combined with analog amplification on a micro chip 1 2nd Generation MEMS sensor element combined with analog amplification and analog to digital converter on one micro chip 3rd Generation Fusion of the sensor element with analog amplification analog to digital converter and digital intelligence for linearization and temperature compensation on the same micro chip 4th Generation Memory cells for calibration and temperature compensation data are added to the elements of the 3rd MEMS sensor generation References Edit Terry S C Jerman J H Angell J B December 1979 A gas chromatographic air analyzer fabricated on a silicon wafer IEEE Transactions on Electron Devices 26 12 1880 1886 doi 10 1109 T ED 1979 19791 Retrieved from https en wikipedia org w index php title MEMS sensor generations amp oldid 1155008237, wikipedia, wiki, book, books, library,
