Laser chemical vapor deposition (LCVD) is a chemical process used to produce high purity, high performance films, fibers, and mechanical hardware (MEMS). It is a form of chemical vapor deposition in which a laser beam is used to locally heat the semiconductor substrate, causing the vapor deposition chemical reaction to proceed faster at that site.[1] The process is used in the semiconductor industry for spot coating,[2] the MEMS industry for 3-D printing of hardware such as springs and heating elements,2,6,7,9 and the composites industry for boron and ceramic fibers.[3][4][5][6][7][8][9] As with conventional CVD, one or more gas phase precursors are thermally decomposed, and the resulting chemical species 1) deposit on a surface, or 2) react, form the desired compound, and then deposit on a surface, or a combination of (1) and (2).[10][11][12]
Referencesedit
^Allen, S.D. (1981-11-01). "Laser chemical vapor deposition: A technique for selective area deposition". Journal of Applied Physics. 52 (11): 6501–6505. doi:10.1063/1.328600. ISSN 0021-8979.
^Method and Apparatus For the Freeform Growth of Three-Dimensional Structures Using Pressurized Precursor Flows and Growth Rate Control (US Patent # 5,786,023)
^T. Wallenberger, Frederick & C. Nordine, Paul & Boman, Mats. (1994). “Inorganic fibers and microstructures directly from the vapor phase”. Composites Science and Technology v 51. pp. 193-212.
^T. Wallenberger, Frederick & C. Nordine, Paul. (1994). “Amorphous Silicon Nitride Fibers Grown from the Vapor Phase”. Journal of Materials Research v 9. pp. 527 - 530.
^Laser-assisted CVD Fabrication and Characterization of Carbon and Tungsten Microhelices for Microthrusters, Uppsala University, 2006, Dissertation, K.L. Williams
^Björklund, K.L & Lu, Jun & Heszler, P & Boman, Mats. (2002). “Kinetics, thermodynamics and microstructure of tungsten rods grown by thermal laser CVD”. Thin Solid Films v 416. pp. 41–48.
^Boman, Mats & Baeuerle, Dieter. (1995). “Laser‐Assisted Chemical Vapor Deposition of Boron”. Journal of the Chinese Chemical Society v 42.
^S. Harrison, J. Pegna, J. Schneiter, K.L. Williams, and R. Goduguchinta, (2017) “Laser Printed Ceramic Fiber Ribbons: Properties and Applications,” 2016 ICACC Proceedings/Ceramic Materials for Energy Applications VI, pp. 61-72
^Maxwell, James & Chavez, Craig & W. Springer, Robert & Maskaly, Karlene & Goodin, Dan. (2007). “Preparation of superhard BxCy fibers by microvortex-flow hyperbaric laser chemical vapor deposition”, Diamond and Related Materials v 16. pp. 1557-1564.
^Williams, K.L. & Jonsson, K & Köhler, Johan & Boman, Mats. (2007). “Electrothermal characterization of tungsten-coated carbon microcoils for micropropulsion systems”. Carbon v 45. pp. 484-492.
^Maxwell, James & Boman, Mats & W Springer, Robert & Narayan, Jaikumar & Gnanavelu, Saiprasanna. (2006). “Hyperbaric Laser Chemical Vapor Deposition of Carbon Fibers from the 1-Alkenes, 1-Alkynes, and Benzene”. Journal of the American Chemical Society v 128. pp. 4405-4413.
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laser, chemical, vapor, deposition, lcvd, chemical, process, used, produce, high, purity, high, performance, films, fibers, mechanical, hardware, mems, form, chemical, vapor, deposition, which, laser, beam, used, locally, heat, semiconductor, substrate, causin. Laser chemical vapor deposition LCVD is a chemical process used to produce high purity high performance films fibers and mechanical hardware MEMS It is a form of chemical vapor deposition in which a laser beam is used to locally heat the semiconductor substrate causing the vapor deposition chemical reaction to proceed faster at that site 1 The process is used in the semiconductor industry for spot coating 2 the MEMS industry for 3 D printing of hardware such as springs and heating elements 2 6 7 9 and the composites industry for boron and ceramic fibers 3 4 5 6 7 8 9 As with conventional CVD one or more gas phase precursors are thermally decomposed and the resulting chemical species 1 deposit on a surface or 2 react form the desired compound and then deposit on a surface or a combination of 1 and 2 10 11 12 References edit Allen S D 1981 11 01 Laser chemical vapor deposition A technique for selective area deposition Journal of Applied Physics 52 11 6501 6505 doi 10 1063 1 328600 ISSN 0021 8979 Method and Apparatus For the Freeform Growth of Three Dimensional Structures Using Pressurized Precursor Flows and Growth Rate Control US Patent 5 786 023 Laser Assisted Fiber Growth US Patent 5 126 200 T Wallenberger Frederick amp C Nordine Paul amp Boman Mats 1994 Inorganic fibers and microstructures directly from the vapor phase Composites Science and Technology v 51 pp 193 212 T Wallenberger Frederick amp C Nordine Paul 1994 Amorphous Silicon Nitride Fibers Grown from the Vapor Phase Journal of Materials Research v 9 pp 527 530 Laser assisted CVD Fabrication and Characterization of Carbon and Tungsten Microhelices for Microthrusters Uppsala University 2006 Dissertation K L Williams Bjorklund K L amp Lu Jun amp Heszler P amp Boman Mats 2002 Kinetics thermodynamics and microstructure of tungsten rods grown by thermal laser CVD Thin Solid Films v 416 pp 41 48 Boman Mats amp Baeuerle Dieter 1995 Laser Assisted Chemical Vapor Deposition of Boron Journal of the Chinese Chemical Society v 42 S Harrison J Pegna J Schneiter K L Williams and R Goduguchinta 2017 Laser Printed Ceramic Fiber Ribbons Properties and Applications 2016 ICACC Proceedings Ceramic Materials for Energy Applications VI pp 61 72 Maxwell James amp Chavez Craig amp W Springer Robert amp Maskaly Karlene amp Goodin Dan 2007 Preparation of superhard BxCy fibers by microvortex flow hyperbaric laser chemical vapor deposition Diamond and Related Materials v 16 pp 1557 1564 Williams K L amp Jonsson K amp Kohler Johan amp Boman Mats 2007 Electrothermal characterization of tungsten coated carbon microcoils for micropropulsion systems Carbon v 45 pp 484 492 Maxwell James amp Boman Mats amp W Springer Robert amp Narayan Jaikumar amp Gnanavelu Saiprasanna 2006 Hyperbaric Laser Chemical Vapor Deposition of Carbon Fibers from the 1 Alkenes 1 Alkynes and Benzene Journal of the American Chemical Society v 128 pp 4405 4413 nbsp This industry related article is a stub You can help Wikipedia by expanding it vte Retrieved from https en wikipedia org w index php title Laser chemical vapor deposition amp oldid 1180697498, wikipedia, wiki, book, books, library,